Open AccessCarbon nanotubes based ultrasonic transducer: realization process, morphological and mechanical properties
Author(s) -
Bérengère Lebental,
Pierre Chainais,
Pascale Chenevier,
Nicolas Chevalier,
Ariane Meguekam Sado,
S. Nicoletti,
Anne Ghis
Publication year - 2009
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - carbon nanotube , materials science , dielectrophoresis , ultrasonic sensor , electrode , capacitive micromachined ultrasonic transducers , membrane , nanotechnology , transducer , optoelectronics , composite material , acoustics , piezoelectricity , microfluidics , physics , chemistry , biology , genetics
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