Open AccessOptimization of a BiCMOS integrated tranducer for self-compensated capacitive pressure sensor
Author(s) -
Philippe Ménini,
G. Blasquez,
Patrick Pons,
C. Douziech,
P Favaro,
Philippe Dondon
Publication year - 1999
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - capacitive sensing , bicmos , pressure sensor , electronic engineering , computer science , electrical engineering , materials science , engineering , transistor , voltage , mechanical engineering