
Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures
Author(s) -
P. Yoboué,
Philippe Ménini,
H. Chalabi,
Véronique Conédéra,
Ludovic Salvagnac,
E. Scheid
Publication year - 2007
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - operating temperature , materials science , oxide , homogeneity (statistics) , temperature measurement , metal , thermal , optoelectronics , computer science , electrical engineering , metallurgy , thermodynamics , engineering , physics , machine learning