Open AccessRESOLUTION LIMITS FOR RESONANT MEMS SENSORS BASED ON DISCRETE RELAY FEEDBACK TECHNIQUES
Author(s) -
Jerome Juillard,
Eric Colinet,
Manuel Domínguez,
Joan Pons,
Josep M. Ricart
Publication year - 2006
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - relay , microelectromechanical systems , computer science , electronic engineering , resolution (logic) , electrical engineering , optoelectronics , materials science , engineering , physics , power (physics) , quantum mechanics , artificial intelligence