Open AccessA near-field scanning microwave microscope in a scanning electron microscope: design and challenges
Author(s) -
Petr Polovodov,
Sophie Eliet,
Olaf C. Haenssler,
Gilles Dambrine,
Kamel Haddadi,
Didier Théron
Publication year - 2019
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microscope , scanning electron microscope , conventional transmission electron microscope , low voltage electron microscope , microwave , optics , scanning transmission electron microscopy , materials science , electron microscope , electron beam induced deposition , environmental scanning electron microscope , scanning hall probe microscope , optoelectronics , computer science , physics , telecommunications