Open AccessMolecules, Radicals and Ions produced in an N2-H2 CCP RF plasma
Author(s) -
Nathalie Carrasco,
David Dubois,
Audrey Chatain,
Ludovic Vettier,
Guy Cernogora
Publication year - 2017
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - radical , mass spectrometry , plasma , molecule , chemistry , ion , analytical chemistry (journal) , spectroscopy , absorption (acoustics) , absorption spectroscopy , materials science , environmental chemistry , organic chemistry , physics , chromatography , quantum mechanics , composite material