Open AccessInfusion Micro-Pump Development Using MEMS Technology
Author(s) -
Eric Chappel,
C. Conan,
S. Mefti,
F. Cannehan,
G.-L. Lettieri,
S. Proennecke,
L. Zanotti,
Marco Ferrera,
A Merassi,
Laura Oggioni,
M Perletti,
A Sciutti
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , materials science , wafer , fabrication , fluidics , peristaltic pump , mechanical engineering , biomedical engineering , optoelectronics , engineering , electrical engineering , medicine , alternative medicine , pathology