Open AccessMulti-axis piezoresistive MEMS force sensor
Author(s) -
Margot Billot,
Étienne Herth,
Joël Agnus,
Emmanuel Piat,
Philippe Stempflé
Publication year - 2015
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - piezoresistive effect , microelectromechanical systems , materials science , acoustics , computer science , electrical engineering , mechanical engineering , optoelectronics , engineering , physics
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