Open AccessMulti-axis piezoresistive MEMS force sensor
Author(s) -
Margot Billot,
Etienne Herth,
Joël Agnus,
Emmanuel Piat,
Philippe Stempflé
Publication year - 2015
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - piezoresistive effect , microelectromechanical systems , acoustics , materials science , electrical engineering , computer science , optoelectronics , engineering , physics