Open AccessVALIDATION OF BENDING TEST BY NANOINDENTATION FOR MICRO-CONTACT ANALYSIS OF RF-MEMS SWITCHES
Author(s) -
Adrien Broué,
Thibaut Fourcade,
Jérémie Dhennin,
F. Courtade,
C. Dieppedale,
Patrick Pons,
Xavier Lafontan,
R. Plana
Publication year - 2009
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - nanoindenter , nanoindentation , microelectromechanical systems , contact force , electrical contacts , materials science , contact resistance , mechanical engineering , contact area , bending , triboelectric effect , engineering , nanotechnology , composite material , physics , layer (electronics) , quantum mechanics