Open AccessLinking design of materials and technological process parameters for tailored integration in Microelectronics field: climbing the scales
Author(s) -
Anne Hémeryck,
Mathilde Guiltat,
Nicolas Salles,
Nicolas Richard
Publication year - 2016
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microelectronics , nanotechnology , process (computing) , computer science , kinetic monte carlo , scale (ratio) , materials science , monte carlo method , physics , mathematics , operating system , statistics , quantum mechanics