Open AccessFlatness calibration of XY translation stages through modal parameterization
Author(s) -
Hugues Favrelière,
Gaëtan Le Goïc,
Serge Samper,
Patrick Belin
Publication year - 2011
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - physics , flatness (cosmology) , modal , calibration , optics , materials science , astrophysics , cosmology , quantum mechanics , polymer chemistry