Open AccessDynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning
Author(s) -
Ismaïl Bouhadda,
Abdenbi Mohand Ousaid,
Patrice Le Moal,
Gilles Bourbon,
Philippe Lutz
Publication year - 2017
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - actuator , microelectromechanical systems , characterization (materials science) , computer science , control engineering , engineering , electrical engineering , materials science , optoelectronics , nanotechnology