Open AccessLow Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
Author(s) -
Salim Touati,
Nicolas Lorphelin,
Alexandre Kanciurzewski,
Renaud Robin,
A.S. Rollier,
Olivier Millet,
Karim Segueni
Publication year - 2008
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - stiction , microelectromechanical systems , voltage , radio frequency , materials science , electrical engineering , optoelectronics , engineering