Open AccessDEVELOPMENT OF SCANNING MEMS MIRROR WITH NEW ASSEMBLY STRUCTURE
Author(s) -
Z.-F. Wang,
Wilfried Noell,
Michael J. Zickar,
Nico de Rooij,
S. P. Lim
Publication year - 2006
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - deep reactive ion etching , microelectromechanical systems , wafer , silicon on insulator , microfabrication , materials science , etching (microfabrication) , comb drive , optics , deformable mirror , reactive ion etching , reflection (computer programming) , optoelectronics , wafer dicing , silicon , fabrication , adaptive optics , computer science , nanotechnology , physics , medicine , alternative medicine , layer (electronics) , pathology , programming language
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