Open AccessGRAYSCALE LITHOGRAPHY TO FABRICATE VARYING-DEPTH NANOCHANNELS IN A SINGLE STEP
Author(s) -
Antoine Naillon,
Hajar Massadi,
Rémi Courson,
Pierre-François Calmon,
Lucie Seveno,
Marc Prat,
Pierre Joseph
Publication year - 2016
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science , lithography , resist , nanoporous , nanotechnology , nanoscopic scale , grayscale , nanolithography , next generation lithography , maskless lithography , fabrication , electron beam lithography , optoelectronics , optics , pixel , medicine , alternative medicine , layer (electronics) , pathology , physics