Open AccessSAW pressure sensor on quartz membrane lapping
Author(s) -
T. Baron,
Daniel Hermelin,
J.P. Romand,
S. Alzuaga,
Samuel Queste,
JeanYves Rauch,
Jean-François Leguen,
B. Belgasem,
S. Ballandras
Publication year - 2010
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - lapping , quartz , pressure sensor , materials science , membrane , optoelectronics , acoustics , mechanical engineering , composite material , engineering , chemistry , physics , biochemistry
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