Open AccessSAW pressure sensor on quartz membrane lapping
Author(s) -
Thomas Baron,
D. Hermelin,
J.P. Romand,
S. Alzuaga,
S. Queste,
Jean-Yves Rauch,
J.-F. Leguen,
B. Belgasem,
S. Ballandras
Publication year - 2010
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - lapping , quartz , pressure sensor , materials science , membrane , optoelectronics , acoustics , electrical engineering , engineering , mechanical engineering , composite material , chemistry , physics , biochemistry