Open AccessTechnological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application
Author(s) -
Nicolas Dufour,
Audrey Chapelle,
Fabien Mesnilgrente,
Véronique Conédéra,
Philippe Ménini
Publication year - 2014
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science , microelectronics , metal , optoelectronics , electronic nose , membrane , oxide , electronic engineering , nanotechnology , metallurgy , chemistry , engineering , biochemistry
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