Open AccessFinite Element Modeling of deformable NEMS taking into accountmechanical contact
Author(s) -
Nicolas Galopin,
Phuong Pham Quang,
Benoît Delinchant,
JeanLouis Coulomb
Publication year - 2011
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - nanoelectromechanical systems , finite element method , materials science , computer science , structural engineering , engineering , nanotechnology , nanoparticle , nanomedicine