Open AccessCryoetching processes applied to ULK material
Author(s) -
Floriane Leroy,
Thomas Tillocher,
Philippe Lefaucheux,
Rémi Dussart,
Koichi Yatsuda,
Kaoru Maekawa,
Christian Dussarrat,
JeanFrançois de Marneffe,
Mikhaı̈l R. Baklanov
Publication year - 2015
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - computer science , materials science