Open AccessDeep reactive ion etching process for PZT actuators
Author(s) -
Djaffar Belharet,
Vincent Chalvet,
Cédric Clévy,
Micky Rakotondrabe,
Laurent Robert
Publication year - 2015
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - reactive ion etching , etching (microfabrication) , materials science , actuator , process (computing) , deep reactive ion etching , ion , optoelectronics , computer science , nanotechnology , chemistry , artificial intelligence , organic chemistry , layer (electronics) , operating system