Open AccessDeep reactive ion etching process for PZT actuators
Author(s) -
Djaffar Belharet,
Vincent Chalvet,
Cédric Clévy,
Micky Rakotondrabe,
Laurent Robert
Publication year - 2015
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - reactive ion etching , materials science , etching (microfabrication) , actuator , deep reactive ion etching , process (computing) , optoelectronics , ion , computer science , nanotechnology , artificial intelligence , chemistry , organic chemistry , layer (electronics) , operating system
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom