Open AccessCreation of a control system for plasma delivery to increase determinism and robustness while processing using an ICP torch
Author(s) -
Hui Ying Zhou,
Renaud Jourdain,
Vincent Serantoni,
J.L. Endrino,
Paul Shore
Publication year - 2016
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - robustness (evolution) , torch , plasma torch , computer science , plasma , materials science , chemistry , physics , metallurgy , biochemistry , quantum mechanics , welding , gene
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