Open AccessRF Capacitively coupled plasmas in N2-H2 mixtures
Author(s) -
Ahmed Mahjoub,
Alexandra Gouveia,
Nathalie Carrasco,
C. D. Pintassilgo,
L. Marques,
Marta M. D. Ramos,
L. L. Alves,
Guy Cernogora
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - capacitively coupled plasma , plasma , atomic physics , radio frequency , materials science , electron density , hydrogen , electron , plasma diagnostics , nitrogen , electron temperature , spectroscopy , kinetic energy , inductively coupled plasma , analytical chemistry (journal) , chemistry , physics , electrical engineering , nuclear physics , organic chemistry , chromatography , quantum mechanics , engineering