Open AccessSensitive detection of nonlinear nanomechanical motion using capacitive signal down-mixing for resonant NEMS-based sensors
Author(s) -
Najib Kacem,
Sébastien Hentz,
Sébastien Baguet,
Régis Dufour
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - nanoelectromechanical systems , capacitive sensing , miniaturization , resonator , capacitance , amplifier , materials science , optoelectronics , electronic engineering , cmos , electrical engineering , nanotechnology , physics , engineering , electrode , nanomedicine , quantum mechanics , nanoparticle