Open AccessNew electrostatically excited Silicon resonator vibrating in a thickness extensional mode
Author(s) -
Sylvain Ballandras,
Mihaela Evan,
Bernard Dulmet,
Gilles Martin,
T. Baron
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - resonator , silicon , materials science , excited state , extensional definition , optoelectronics , mode (computer interface) , q factor , acoustics , microelectromechanical systems , physics , computer science , atomic physics , paleontology , tectonics , operating system , biology