PARAMETRIC YIELD ANALYSIS OF MEMS VIA STATISTICAL METHODS | Zendy

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PARAMETRIC YIELD ANALYSIS OF MEMS VIA STATISTICAL METHODS

Author(s) -

Shyam Praveen Vudathu,

K.K. Duganapalli,

Rainer Laur,

Angelika Bunse Gerstner

Publication year - 2006

Publication title -

hal (le centre pour la communication scientifique directe)

Language(s) - Uncategorized

Resource type - Conference proceedings

Subject(s) - microelectromechanical systems , parametric statistics , yield (engineering) , statistical analysis , computer science , materials science , statistics , mathematics , optoelectronics , composite material

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