Open AccessPARAMETRIC YIELD ANALYSIS OF MEMS VIA STATISTICAL METHODS
Author(s) -
Shyam Praveen Vudathu,
K.K. Duganapalli,
Rainer Laur,
Angelika Bunse Gerstner
Publication year - 2006
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , parametric statistics , yield (engineering) , statistical analysis , computer science , materials science , statistics , mathematics , optoelectronics , composite material