Open AccessModeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film
Author(s) -
Thomas Perrier,
Raphaël Levy,
Patrick Kayser,
Béatrice Verlhac,
Johan Moulin
Publication year - 2018
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - magnetometer , microelectromechanical systems , ferromagnetism , materials science , thin film , optoelectronics , condensed matter physics , physics , magnetic field , nanotechnology , quantum mechanics