Formation of single-crystal silicon nanoparticles at very low gas temperature in a rf silane-based discharge | Zendy

Marjorie Cavarroc | Zendy; Maxime Mikikian | Zendy; Lénaïc Couëdel | Zendy; Laïfa Boufendi | Zendy

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Formation of single-crystal silicon nanoparticles at very low gas temperature in a rf silane-based discharge

Author(s) -

Marjorie Cavarroc,

Maxime Mikikian,

Lénaïc Couëdel,

Laïfa Boufendi

Publication year - 2006

Publication title -

hal (le centre pour la communication scientifique directe)

Language(s) - English

Resource type - Conference proceedings

Subject(s) - crystallinity , silane , materials science , silicon , plasma , radio frequency , nanoparticle , analytical chemistry (journal) , langmuir probe , radio frequency power transmission , crystal (programming language) , optoelectronics , electric discharge in gases , particle (ecology) , single crystal , plasma diagnostics , nanotechnology , chemistry , composite material , electrical engineering , crystallography , engineering , quantum mechanics , physics , cmos , amplifier , oceanography , computer science , chromatography , programming language , geology

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