Open AccessFormation of single-crystal silicon nanoparticles at very low gas temperature in a rf silane-based discharge
Author(s) -
Marjorie Cavarroc,
Maxime Mikikian,
Lénaïc Couëdel,
Laïfa Boufendi
Publication year - 2006
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - crystallinity , silane , materials science , silicon , plasma , radio frequency , nanoparticle , analytical chemistry (journal) , langmuir probe , radio frequency power transmission , crystal (programming language) , optoelectronics , electric discharge in gases , particle (ecology) , single crystal , plasma diagnostics , nanotechnology , chemistry , composite material , electrical engineering , crystallography , engineering , quantum mechanics , physics , cmos , amplifier , oceanography , computer science , chromatography , programming language , geology