Open AccessWafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
Author(s) -
Denis Dezest,
Fabrice Mathieu,
Laurent Mazenq,
Caroline Soyer,
J. Costecalde,
Denis Rémiens,
Olivier Thomas,
JeanFrançois Deü,
Liviu Nicu
Publication year - 2013
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - resonator , nanoelectromechanical systems , wafer , wafer scale integration , materials science , piezoelectricity , microelectromechanical systems , optoelectronics , actuator , scale (ratio) , electronic engineering , electrical engineering , nanotechnology , engineering , physics , nanomedicine , quantum mechanics , nanoparticle , composite material