Open AccessWafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
Author(s) -
Denis Dezest,
Fabrice Mathieu,
Laurent Mazenq,
Caroline Soyer,
J. Costecalde,
Denis Rémiens,
Olivier Thomas,
JeanFrançois Deü,
Liviu Nicu
Publication year - 2013
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - wafer , lead zirconate titanate , piezoelectricity , materials science , resonator , wafer scale integration , nanoelectromechanical systems , scale (ratio) , optoelectronics , electronic engineering , nanotechnology , ferroelectricity , engineering , composite material , dielectric , nanoparticle , physics , nanomedicine , quantum mechanics
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