Open AccessOn the Impact of Relative Humidity and Environment Gases on Dielectric Charging Process in Capacitive RF MEMS Switches Based on Kelvin Probe Force Microscopy
Author(s) -
Heiba Zaghloul,
Bharat Bhushan,
Patrick Pons,
G. Papaioannou,
Fabio Coccetti,
R. Plana
Publication year - 2010
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - kelvin probe force microscope , plasma enhanced chemical vapor deposition , silicon nitride , dielectric , relative humidity , materials science , capacitive sensing , microelectromechanical systems , optoelectronics , substrate (aquarium) , silicon , deposition (geology) , chemical vapor deposition , nanotechnology , electrical engineering , atomic force microscopy , physics , engineering , thermodynamics , paleontology , oceanography , sediment , geology , biology