Open AccessProposal of a novel Knudsen pump design benefitting from drilling and 3D printing techniques in low conductivity materials
Author(s) -
Guillermo López Quesada,
Giorgos Tatsios,
Stéphane Colin,
Dimitris Valougeorgis,
Lucien Baldas,
Christine Barrot-Lattes,
Marcos Rojas-Cárdenas
Publication year - 2018
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microscale chemistry , knudsen number , microfabrication , microchannel , miniaturization , materials science , outgassing , ultra high vacuum , vacuum pump , knudsen flow , mechanics , mass flow , microelectromechanical systems , mass flow rate , mechanical engineering , volumetric flow rate , pressure gradient , vacuum chamber , optoelectronics , nanotechnology , physics , engineering , medicine , mathematics education , mathematics , alternative medicine , pathology , astronomy , fabrication , composite material