Open AccessRF MEMS electrical contact resistance calculation using mechanical contact simulations and analytical models
Author(s) -
Fabienne Pennec,
David Peyrou,
Adrien Broué,
Jérémie Dhennin,
Patrick Pons,
R. Plana,
F. Courtade
Publication year - 2009
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - electrical contacts , contact resistance , finite element method , contact area , contact force , mechanical engineering , microelectromechanical systems , contact geometry , surface finish , computer science , characterization (materials science) , materials science , structural engineering , engineering , layer (electronics) , nanotechnology , physics , composite material , quantum mechanics , geometry , mathematics