Open AccessComparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models
Author(s) -
Timo Veijola,
Giorgio De Pasquale,
Aurelio Soma
Publication year - 2008
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science