Open AccessTemperature Measurement of Microsystems by Scanning Thermal Microscopy
Author(s) -
Séverine Gomès,
O. Chapuis,
F. Nepveu,
N. Trannoy,
Sébastian Volz,
Benoît Charlot,
Gilles Tessier,
S. Dhilaire,
B. Cretin,
Pascal Vairac
Publication year - 2005
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science , microsystem , metrology , passivation , scanning thermal microscopy , layer (electronics) , resolution (logic) , optoelectronics , thermal , microscopy , temperature measurement , integrated circuit , scanning electron microscope , microscope , scanning probe microscopy , optics , nanotechnology , composite material , atomic force microscopy , physics , quantum mechanics , computer science , artificial intelligence , meteorology
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