Open AccessA novel deep-UV polymer for integrated photonics: waveguides structures towards cascade of multiple micro-resonators
Author(s) -
Bruno Bêche,
Rigoberto CastroBeltrán,
David Pluchon,
Daphné Duval,
Marion Specht,
Nolwenn Huby,
Hervé Lhermite
Publication year - 2014
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - photonics , resonator , realization (probability) , materials science , lithography , optoelectronics , waveguide , cascade , pedestal , integrated optics , optics , physics , engineering , chemical engineering , mechanical engineering , statistics , mathematics