Open AccessNext Generation of TCAD Environments for MEMS Design
Author(s) -
Triltsch, Udo,
Büttgenbach, Stephanus
Publication year - 2008
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , computer science , materials science , optoelectronics