Open AccessCompositional characterization of SiC-SiO2 interfaces in MOSFETs
Author(s) -
Anna Maria Beltrán,
Sylvie Schamm-Chardon,
Vincent Mortet,
Eléna Bedel-Pereira,
Fuccio Cristiano,
Christian Strenger,
A. J. Bauer
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - high resolution transmission electron microscopy , characterization (materials science) , materials science , context (archaeology) , mosfet , electron mobility , transmission electron microscopy , optoelectronics , silicon carbide , engineering physics , nanotechnology , electrical engineering , transistor , engineering , composite material , geology , paleontology , voltage