Etude de la stabilité thermique et de l'influence de l'épaisseur sur les contraintes de couches de Cr et CrN obtenues par pulvérisation cathodique, | Zendy

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Etude de la stabilité thermique et de l'influence de l'épaisseur sur les contraintes de couches de Cr et CrN obtenues par pulvérisation cathodique,

Author(s) -

Corinne Nouveau,

Yacine Benlatreche,

L. Chekour,

C. Labidi

Publication year - 2006

Publication title -

hal (le centre pour la communication scientifique directe)

Language(s) - French

Resource type - Conference proceedings

Subject(s) - physics , humanities , art

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