Open AccessDevelopment of Atomic Layer Etching (ALEt) for GaN-based materials
Author(s) -
Congying You,
C. Mannequin,
Gwénolé Jacopin,
T. Chevolleau,
Corentin Durand,
C. Vallée,
H. Mariette,
Masami Sasaki,
Etienne Gheeraert
Publication year - 2018
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - etching (microfabrication) , layer (electronics) , materials science , optoelectronics , atomic layer deposition , nanotechnology