Open AccessNon-aqueous Sol-Gel routes applied to atomic layer deposition
Author(s) -
Erwan Rauwel,
Guylhaine Clavel,
MarcGeorg Willinger,
Protima Rauwel,
F. Ducroquet,
Nicola Pinna
Publication year - 2008
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - atomic layer deposition , aqueous solution , layer (electronics) , deposition (geology) , materials science , chemical engineering , nanotechnology , computer science , chemistry , geology , engineering , organic chemistry , paleontology , sediment
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