Open AccessSqueeze film damping in CMUTs with air-filled cavities
Author(s) -
Ayrat Galisultanov,
Patrice Le Moal,
Vincent Walter,
Gilles Bourbon
Publication year - 2016
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science , acoustics , physics