Open AccessOn the direct bonding of two silicon surfaces: experiments and modeling
Author(s) -
Natacha Cocheteau,
Frédéric Lebon,
Iulian Rosu,
Sonia Ait Zaid,
Isabelle Savin de Larclause
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - silicon , direct bonding , materials science , characterization (materials science) , adhesion , interface (matter) , chemical bond , nanotechnology , composite material , computer science , optoelectronics , chemistry , organic chemistry , capillary number , capillary action