Open AccessLaser ultrasonics and guided waves for the thickness estimation of thin layers
Author(s) -
Fabien Lefèvre,
Frédéric Jenot,
Mohammadi Ouaftouh,
Marc Duquennoy,
Mohamed Ourak
Publication year - 2010
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - wafer , materials science , dispersion (optics) , ultrasonic sensor , layer (electronics) , optics , substrate (aquarium) , laser , lamb waves , silicon , fourier transform , acoustics , wave propagation , optoelectronics , composite material , geology , physics , oceanography , quantum mechanics
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