Open AccessEstimation of detrimental impact of new metals candidate in advanced microelectronic
Author(s) -
Yannick Borde,
Adrien Danel,
Agnès Roche,
A. Grouillet,
M. Veillerot
Publication year - 2006
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microelectronics , miniaturization , transistor , materials science , work (physics) , integrated circuit , computer science , silicon , electronic circuit , engineering physics , electronic engineering , electrical engineering , nanotechnology , optoelectronics , engineering , mechanical engineering , voltage