Open AccessOPC model error study through mask and SEM measurement error
Author(s) -
Mame Kouna Top,
David Fuard,
Vincent Farys,
Yorick Trouiller,
Patrick Schiavone
Publication year - 2010
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - computer science , error analysis , error detection and correction , observational error , algorithm , statistics , mathematics