Open AccessLa0.7Sr0.3MnO3 suspended microbridges for uncooled bolometers made using reactive ion etching of the silicon substrates
Author(s) -
Shuang Liu,
Bruno Guillet,
Ammar Aryan,
Carlo Adamo,
Cédric Fur,
Jean-Marc Routoure,
F. Lemarie,
Darrell G. Schlom,
Laurence Méchin
Publication year - 2012
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - bolometer , reactive ion etching , materials science , etching (microfabrication) , silicon , optoelectronics , nanotechnology , optics , physics , layer (electronics) , detector