Open AccessImproved resolution of submicron KrF laser ablation of polymers by a new filtered imaging irradiation
Author(s) -
Isamu Miyamoto,
Henry Helvajian,
Kazuyoshi Itoh,
Kojiro F. Kobayashi,
Andreas Ostendorf,
Koji Sugioka,
F. Weisbuch,
V. Tokarev,
D. Débarre
Publication year - 2004
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science , irradiation , ablation , laser ablation , laser , resolution (logic) , optics , image resolution , polymer , optoelectronics , computer science , physics , composite material , artificial intelligence , nuclear physics , engineering , aerospace engineering