Open AccessOverview of out of plane MEMS assembly techniques.
Author(s) -
Michaël Gauthier,
Cédric Clévy,
Sounkalo Dembélé,
Brahim Tamadazte,
Kanty Rabenorosoa,
Nadine Piat,
Philippe Lutz
Publication year - 2011
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microsystem , automation , microelectromechanical systems , field (mathematics) , computer science , throughput , engineering , mechanical engineering , nanotechnology , materials science , telecommunications , mathematics , pure mathematics , wireless