Open AccessPlasma etching of thick Parylene C for fabrication of biocompatible electrodes
Author(s) -
Aurélie Lecestre,
Aziliz Lecomte,
David Bourrier,
Pascal Dubreuil,
Emeline Descamps,
Christian Bergaud
Publication year - 2016
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - parylene , etching (microfabrication) , materials science , fabrication , reactive ion etching , nanotechnology , plasma etching , biocompatibility , polymer , dry etching , isotropic etching , substrate (aquarium) , optoelectronics , composite material , medicine , oceanography , geology , metallurgy , alternative medicine , layer (electronics) , pathology