Open AccessAnalysis of the pull-in voltage in capacitive mechanical sensors
Author(s) -
Joseph Lardiès,
Olivia Arbey,
Marc Berthillier
Publication year - 2010
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - capacitive sensing , voltage , electrical engineering , materials science , computer science , acoustics , electronic engineering , optoelectronics , engineering , physics