Open AccessMethodology to Analyze Failure Mechanisms of Ohmic Contacts on MEMS Switches
Author(s) -
Adrien Broué,
Jérémie Dhennin,
Cédric Séguineau,
Xavier Lafontan,
Christel Dieppedale,
Jean-Michel Desmarres,
Patrick Pons,
Robert Plana
Publication year - 2009
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - ohmic contact , microelectromechanical systems , computer science , reliability engineering , materials science , optoelectronics , engineering , nanotechnology , layer (electronics)